39 citations · 169 across the 15 of their papers we have counts for
4 papers · 1 filter
Design of a 3000-pixel transition-edge sensor x-ray spectrometer for microcircuit tomography
Paul Szypryt, Douglas A. Bennett, William J. Boone +28
Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabr…
Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer
Nathan Nakamura, Paul Szypryt, Amber L. Dagel +30
X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux an…
A Transition-edge Sensor-based X-ray Spectrometer for the Study of Highly Charged Ions at the National Institute of Standards and Technology Electron Beam Ion Trap
P. Szypryt, G. C. O'Neil, E. Takacs +15
We report on the design, commissioning, and initial measurements of a Transition-edge Sensor (TES) x-ray spectrometer for the Electron Beam Ion Trap (EBIT) at the National Institut…
Mitigating the effects of charged particle strikes on TES arrays for exotic atom X-ray experiments
H. Tatsuno, D. A. Bennett, W. B. Doriese +16
Exotic atom experiments place transition-edge-sensor (TES) microcalorimeter arrays in a high-energy charged particle rich environment. When a high-energy charged particle passes th…