43 citations · 77 across the 5 of their papers we have counts for
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physics.app-ph2018★ 9 cited
Changes in the near edge X-ray absorption fine structure of hybrid organic-inorganic resists upon exposure
Roberto Fallica, Benjamin Watts, Benedikt Rösner +4
We report on the near edge X-ray absorption fine structure (NEXAFS) spectroscopy of hybrid organic-inorganic resists. These materials are nonchemically amplified systems based on S…
physics.app-ph2018★ 43 cited
Exploiting atomic layer deposition for fabricating sub-10 nm X-ray lenses
Benedikt Rösner, Frieder Koch, Florian Döring +12
Moving towards significantly smaller nanostructures, direct structuring techniques such as electron beam lithography approach fundamental limitations in feature size and aspect rat…