Sublime Transfer Printing of Three-Dimensional Nanostructure Ensembles

Abstract

High-resolution three-dimensional (3D) nanostructures for visible-light photon manipulation provide unique and bespoke capabilities in optics and photonics. However subwavelength nanofabrication and reliable ensemble manipulation of the 3D prints onto arbitrary substrates remain challenging. Here, we introduce sublime transfer strategy tailored for transfer printing ensembles of delicate 3D printed nanostructures. This strategy enables conformal, damage-free integration of arrays of 3D structures on diverse substrates. Naphthalene acts as a transient stamp to encapsulate the structures during transfer and placement. We rely on the low sublimation temperature of naphthalene to release the structures reliably with nearly zero stress, preventing mechanical damage and positional misalignment. This approach is broadly applicable to integrate diverse nanostructures and photonic devices onto various substrates, and enabling inorganic architectures through ensemble uniform post-processing, including 2.5D photonic crystals on flexible PDMS, diffractive optical elements on curved lenses, spiral phase plates on CMOS chips, multilayer achromatic metalens on optical fiber facet, as well as 3D glass photonic crystals and optical topological resonators on anti-stiction quartz.