Sideband-Resolved 4H-SiC Optomechanical Resonators with Interference-Engineered Anchor-Loss Suppression
arXiv:2607.26199
The paper demonstrates sideband‑resolved cavity optomechanical resonators made from 4H‑silicon carbide microdisks that achieve high optical and mechanical quality factors through interference‑engineered anchor‑loss suppression, and reports the first observation of optomechanically induced transparency in this platform.
Abstract
Sideband-resolved cavity optomechanical resonators provide a powerful platform for coherent photon--phonon interactions, enabling applications ranging from quantum state transduction and optomechanically induced transparency to precision sensing and microwave photonics. Achieving this regime in integrated microresonators, however, requires simultaneously realizing a narrow optical cavity linewidth, a high-frequency mechanical mode, and low mechanical dissipation. Here, we report the first sideband-resolved optomechanical resonators based on the 4H silicon carbide (4H-SiC) platform. By combining compact microdisk geometries with interference-engineered anchor-loss suppression, we simultaneously achieve intrinsic optical quality factors exceeding , room-temperature mechanical quality factors up to , and a sideband-resolution factor greater than seven. Systematic numerical and experimental studies reveal that a local minimum in anchor loss enables high mechanical quality factors without requiring aggressive undercutting, substantially improving fabrication yield and device robustness. We further demonstrate the first observation of optomechanically induced transparency in integrated 4H-SiC resonators, confirming coherent cavity optomechanical interactions in this material platform. These results establish 4H-SiC as a promising platform for integrated cavity optomechanics and provide a practical route toward scalable photon--phonon devices for classical and quantum photonic technologies.