Interfacial thermal transport in Si/SiC and SiC/diamond heterostructures: effects of amorphous interlayers and SiC polytypes

Abstract

This study examines phonon-mediated heat transfer across Si/SiC and SiC/diamond interfaces using non-equilibrium molecular dynamics simulations, emphasizing the influence of SiC polytypes and amorphous interlayers. For sharp interfaces, 4H-SiC exhibits considerably higher interfacial thermal conductance (ITC) than 3C-SiC, due to its broader active phonon spectrum and superior spectral matching with Si. While amorphous layers generally reduce ITC, a key observation is that an ultrathin 0.5-nm amorphous SiC (aSiC) layer can enhance heat transport in the Si/3C-SiC system: the ITC increases from 613 MW/m^2-K (sharp) to 716 MW/m^2-K, demonstrating a phonon-bridge effect. VDOS (vibrational density of states) analysis confirms that optimized ultrathin aSiC layers improve vibrational overlap and open additional phonon-transport channels. In contrast, thicker or silicon-rich amorphous layers significantly suppress ITC through enhanced inelastic phonon scattering. For SiC/diamond interfaces, any amorphous layer, particularly aSi, causes severe ITC degradation, highlighting the need for sharp, defect-free bonding to exploit diamond's high thermal conductivity.

40 pages, 11 figures

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