A Plasma-Based Approach for High-Power Tunable Microwave Varactors
arXiv:2404.18068
Abstract
This work presents a tunable varactor with tunability in the range of 100s of MHz and a capacitance delta of about 36 pF by employing a perpendicular magnetic field to a capacitively-coupled (CCP) RF plasma cell. A comprehensive high-frequency circuit model for the fabricated varactor is proposed and verified experimentally for a plasma electron number density of which has a tunability of 146 MHz with a magnetic flux density ranging from 0 to 246 milliTesla. Under a pressure of 64 milliTorrs, the Argon ccp was found to have a variable capacitance ranging from 4 pF to 41.72 pF.
Paper data disputed by originator of the device designer