Optical tools for laser machining along six orders of magnitude

Abstract

We present an overview on the development and characterization of multiscale laser processing optics for versatile material modifications across more than six orders of magnitude. Starting with solutions for micromachining we present high-NA microscope objectives creating sub-wavelength material modifications on macroscopic scales with highest peak intensities. Moving on to the millimeter range, the adaptability and scalability of scanning optics is examined for large-area machining. Finally, we explore line beam optics in the meter range, evaluating their use in uniform material processing using average powers above 100kW. This study provides an insight into the design and performance characteristics of such optics and demonstrates their potential in advanced laser processing.

Review article with 12 pages, 15 figures and 74 references

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