Multimode characterization of an optical beam deflection setup

Abstract

Optical beam deflection is a popular method to measure the deformation of micromechanical devices. As it measures mostly a local slope, its sensitivity depends on the location and size of the optical spot. We present a method to evaluate precisely these parameters, using the relative amplitude of the thermal noise induced vibrations. With a case study of a microcantilever, we demonstrate the accuracy of the approach, as well as its ability to fully characterize the sensitivity of the detector and the parameters (mass, stiffness) of the resonator.

References in corpus (4)

• Advances in atomic force microscopy
• Direct measurement of spatial modes of a micro-cantilever from thermal noise
• Extended equipartition in a mechanical system subject to a heat flow: the case of localised dissipation
• Thermal noise of a cryo-cooled silicon cantilever locally heated up to its melting point