Smart sensing of the multifunctional properties of magnetron sputtered $Mo{S}_2$ across the amorphous-crystalline transition

Abstract

Molybdenum disulfide, $Mo{S}_2$, is a next-generation semiconductor and is frequently integrated into emergent optoelectronic technologies based on two-dimensional materials. Here, we present a method that provides direct optical feedback on the thickness and crystallinity of sputter-deposited $Mo{S}_2$ down to the few-layer regime. This smart sensing enables tracking the material's functional properties, such as excitonic response, sheet resistance, and hardness across the amorphous-crystalline transition. To illustrate the potential of such feedback-controlled fabrication, we realized $Mo{S}_2$-based hyperbolic metamaterials (HMM) with controllable optical topological transitions and hardness.

17 pages, 4 figures, 68 references. Supplementary available with 16 pages, 8 figures, and 10 references