Frequency perturbation integral for piezoelectric quartz crystal microbalances based on scalar differential equations

Abstract

We study frequency shifts in a piezoelectric quartz resonator induced by a surface mass layer for sensor applications. The scalar differential equations for thickness-shear modes in a quartz plate are used. A first-order perturbation analysis is performed. The frequency shift is obtained and is expressed by a perturbation integral. It produces the well-known Sauerbrey equation for mass sensitivity in the special case of a uniform mass layer. As an application of the perturbation integral, frequency shifts due to a nonuniform mass layer are calculated.