Flexible Integration of Gigahertz Nanomechanical Resonators with a Superconducting Microwave Resonator using a Bonded Flip-Chip Method

Abstract

We demonstrate strong coupling of gigahertz-frequency nanomechanical resonators to a frequency-tunable superconducting microwave resonator via a galvanically bonded flip-chip method. By tuning the microwave resonator with an external magnetic field, we observe a series of hybridized microwave-mechanical modes and report coupling strengths of $\sim 15\text{MHz}$ at cryogenic temperatures. The demonstrated multi-chip approach provides flexible rapid characterization and simplified fabrication, and could potentially enable coupling between a variety of quantum systems. Our work represents a step towards a plug-and-play architecture for building more complex hybrid quantum systems.

10 pages, 8 figures. First three authors contributed equally to this work