Stepwise fabrication and optimization of coplanar waveguide resonator hybrid devices

Abstract

From the background of microwave-optomechanical experiments involving carbon nanotubes, the optimization of superconducting coplanar waveguide resonator devices is discussed. Two devices, one with unmodified geometry compared to previous work and one integrating several improvements, are lithographically built up step by step. After each step, the low temperature GHz transmission properties are retested. This allows to identify the impact of the fabrication and the geometry modification on the device properties. In addition, simplified circuit geometries are modeled numerically, confirming the experimental results and providing further insights for optimization.

4 figure, 5 pages. Physica Status Solidi B (2023)

References in corpus (5)

• Quantum supercurrent transistors in carbon nanotubes
• Carbon nanotubes as ultra-high quality factor mechanical resonators
• Nanotube mechanical resonators with quality factors of up to 5 million
• Coupling carbon nanotube mechanics to a superconducting circuit
• Development of a broadband reflective T-filter for voltage biasing high-Q superconducting microwave cavities

Cited by in corpus (1)

• Optomechanical coupling and damping of a carbon nanotube quantum dot