Recycling of Perovskite Substrate

Abstract

The use of water-soluble sacrificial layer of Sr${}_3$Al${}_2$O${}_6$ has tremendously boosted the research on freestanding functional oxide thin films, especially thanks to its ultimate capability to produce high-quality epitaxial perovskite thin films. However, the costly single-crystalline substrates, e.g. SrTiO${}_3$, were generally discarded after obtaining the freestanding thin films. Here, we demonstrate that the SrTiO${}_3$ substrates can be recycled to fabricate La${}_{0.7}$Sr${}_{0.3}$MnO${}_3$ films with nearly identical structural and electrical properties. After attaining freestanding thin films, the residues on SrTiO${}_3$ can be removed by 80 \degree C hot water soaking and rinsing treatments. Consequently, the surface of SrTiO${}_3$ reverted to its original step-and-terrace structure.

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