Design and fabrication of ridge waveguide-based nanobeam cavities for on-chip single-photon sources

Abstract

We report on the design of nanohole/nanobeam cavities in ridge waveguides for on-chip, quantum-dot-based single-photon generation. Our design overcomes limitations of a low-refractive-index-contrast material platform in terms of emitter-mode coupling efficiency and yields an outcoupling efficiency of 0.73 to the output ridge waveguide. Importantly, this high coupling efficiency is combined with broadband operation of 9 nm full-width half-maximum. We provide an explicit design procedure for identifying the optimum geometrical parameters according to the developed design. Besides, we fabricate and optically characterize a proof-of-concept waveguide structure. The results of the microphotoluminescence measurements provide evidence for cavity-enhanced spontaneous emission from the quantum dot, thus supporting the potential of our design for on-chip single-photon sources applications.

References in corpus (6)

• Single-Photon Switching and Entanglement of Solid-State Qubits in an Integrated Nanophotonic System
• Boson sampling with 20 input photons in 60-mode interferometers at $10^{14}$ state spaces
• A solid-state entangled photon pair source with high brightness and indistinguishability
• Experimental realization of highly-efficient broadband coupling of single quantum dots to a photonic crystal waveguide
• Monolithic on-chip integration of semiconductor waveguides, beamsplitters and single-photon sources
• Numerical Investigation of Light Emission from Quantum Dots Embedded into On-Chip, Low Index Contrast Optical Waveguides