Nanoscale Fabrication of Graphene by Hydrogen-Plasma Etching
arXiv:2203.05155 · doi:10.1380/ejssnt.2022-022
Abstract
Graphene is attracting vast interest due to its superior electronic and mechanical properties. However, structure and electronic properties of its edge are often neglected, although they are important for nanoscale devices because the edge ratio becomes larger by decreasing the device size. In this study, we suggest a way to fabricate a graphene with atomically aligned zigzag edges by applying hydrogen-plasma etching (HPE) technique. By patterning a graphene prior to HPE, it is succeeded to shape a graphene in desired structure. Both atomic force microscopy and Raman spectroscopy confirm that the graphene shaped by this technique preserves its honeycomb structure even on the edge, which is aligned with zigzag structure. Although the mechanism of the anisotropic etching by hydrogen-plasma have not been clarified yet, the sample position dependence of the etching rate suggests that the hydrogen-radicals are responsible for the anisotropic etching.
arXiv comment5 pages, 4 figures
References in corpus (13)
- Electric Field Effect in Atomically Thin Carbon Films
- Two-Dimensional Gas of Massless Dirac Fermions in Graphene
- Experimental Observation of Quantum Hall Effect and Berry's Phase in Graphene
- Energy Band Gap Engineering of Graphene Nanoribbons
- On-surface synthesis of graphene nanoribbons with zigzag edge topology
- Room temperature magnetic order on zigzag edges of narrow graphene nanoribbons
- Observation of zigzag and armchair edges of graphite using scanning tunneling microscopy and spectroscopy
- Scanning tunneling microscopy and spectroscopy of the electronic local density of states of graphite surfaces near monoatomic step edges
- Tunable Coulomb blockade in nanostructured graphene
- Scanning tunneling microscopy and spectroscopy studies of graphite edges
- Atomic force microscope nanolithography of graphene: cuts, pseudo-cuts and tip current measurements
- Anisotropic Etching of Graphite and Graphene in a Remote Hydrogen Plasma
- Hexagonal Nanopits with the Zigzag Edge State on Graphite Surfaces Synthesized by Hydrogen-Plasma Etching