High-frequency traveling-wave phononic cavity with sub-micron wavelength
arXiv:2202.07217 · doi:10.1063/5.0086751
Abstract
Thin-film gallium nitride (GaN) as a proven piezoelectric material is a promising platform for the phononic integrated circuits, which hold great potential for scalable information processing processors. Here, an unsuspended traveling phononic resonator based on high-acoustic-index-contrast mechanism is realized in GaN-on-Sapphire with a frequency up to 5 GHz, which matches the typical superconducting qubit frequency. A sixfold increment in quality factor was found when temperature decreases from room temperature () to () and thus a frequency-quality factor product of is obtained. Higher quality factors are available when the fabrication process is further optimized. Our system shows great potential in hybrid quantum devices via circuit quantum acoustodynamics.
References in corpus (3)
Cited by in corpus (8)
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