Sintering BFO targets for sputtering

Gilad Orr; Andrey Goryachev; Gady Golan

doi:10.34049/bcc.52.C.0047

paper

Sintering BFO targets for sputtering

arXiv:2102.00763 · doi:10.34049/bcc.52.C.0047

Abstract

Ceramic $B i F e O_{3}$ samples were prepared by rapid sintering at $88 0^{O} C$ . Two compositions were examined. A $56/44 B i_{2} O_{3} / F e_{2} O_{3} m o l e %$ composition and a $56 B i_{2} O_{3} \cdot 44 F e_{2} O_{3} + 6.5 w t % N a C l$ composition. The samples were heat treated at different times up to $8$ minutes and the phase content was examined as a function of the time using XRD measurements and analysis. It was demonstrated that using both compositions, maximum $B i F e O_{3}$ phase content is obtained after $3.5$ minutes. In the former approximately $50%$ of the material transformed to $B i F e O_{3}$ while in the latter $98.5%$ .