Surface acoustic wave photonic devices in silicon on insulator

Abstract

Opto-mechanical interactions in planar photonic integrated circuits draw great interest in basic research and applications. However, opto-mechanics is practically absent in the most technologically significant photonics platform: silicon on insulator. Previous demonstrations required the under-etching and suspension of silicon structures. Here we present surface acoustic wave-photonic devices in silicon on insulator, up to 8 GHz frequency. Surface waves are launched through absorption of modulated pump light in metallic gratings and thermoelastic expansion. The surface waves are detected through photo-elastic modulation of an optical probe in standard race-track resonators. Devices do not involve piezo-electric actuation, suspension of waveguides or hybrid material integration. Wavelength conversion of incident microwave signals and acoustic true time delays up to 40 ns are demonstrated on-chip. Lastly, discrete-time microwave-photonic filters with up to six taps and 20 MHz wide passbands are realized using acoustic delays. The concept is suitable for integrated microwave-photonics signal processing

References in corpus (19)

• Cavity Optomechanics
• Sub-Hz Linewidth Photonic-Integrated Brillouin Laser
• Integrated Waveguide Brillouin Laser
• Interaction between light and highly confined hypersound in a silicon photonic nanowire
• Coherent coupling between radio frequency, optical, and acoustic waves in piezo-optomechanical circuits
• Large Brillouin Amplification in Silicon
• Breaking time-reversal symmetry with acoustic pumping of nanophotonic circuits
• Stimulated optomechanical excitation of surface acoustic waves in a microdevice
• Controlling phonons and photons at the wavelength-scale: silicon photonics meets silicon phononics
• Control of coherent information via on chip photonic-phononic emitter-receivers
• Diamond optomechanical crystals
• A chip-integrated coherent photonic-phononic memory
• On-chip Inter-modal Brillouin Scattering
• Photonic microwave generation with high-power photodiodes
• Thermo-mechanical behavior of surface acoustic waves in ordered arrays of nanodisks studied by near infrared pump-probe diffraction experiments
• Single-crystal diamond low-dissipation cavity optomechanics
• Unifying Brillouin scattering and cavity optomechanics
• Integrated RF-photonic Filters via Photonic-Phononic Emit-Receive Operations
• Ultrafast laser pulses to detect and generate fast thermo-mechanical transients in matter

Cited by in corpus (8)

• Electrically-driven Acousto-optics and Broadband Non-reciprocity in Silicon Photonics
• Tunable RF-photonic filtering with high out-of-band rejection in silicon
• On-Chip Stimulated Brillouin Scattering via Surface Acoustic Waves
• All-optical nonlinear activation function based on stimulated Brillouin scattering
• High frequency mechanical excitation of a silicon nanostring with piezoelectric aluminum nitride layers
• Focusing Surface Acoustic Waves with a Plasmonic Hypersonic Lens
• Supershear surface waves reveal prestress and anisotropy of soft materials
• Light modulation in Silicon photonics by PZT actuated acoustic waves