Plasma Stratification in Radio-Frequency Discharges of Noble Gases

Abstract

We conducted experimental studies and computer simulations of standing striations in capacitive coupled plasma in Argon gas. Standing striations were observed at frequencies 3.6, 8.4 and 19.0 MHz, in a pressure range 0.05-10 Torr, tube radius R=1.1 cm, for a certain range of discharge currents (plasma densities). Numerical simulations revealed similar nature of standing striations in CCP and moving striations in DC discharges under similar discharge conditions. Comparison of computer simulations with experimental observations helped clarify the nature of these striations. The non-linear dependence of the ionization rate on electron density is shown to be the main underlying mechanism of the stratification phenomena.

Cited by in corpus (6)

• Ionization waves (striations) in a low-current plasma column revisited with kinetic and fluid models
• A self-consistent hybrid model of kinetic striations in low-current Argon discharges
• Ionization waves (striations) in low-current DC discharges in noble gases obtained with a hybrid kinetic-fluid model
• Electron kinetics in standing and moving striations in argon gas
• Formation mechanisms of striations in a filamentary dielectric barrier discharge in atmospheric pressure argon
• Influence of the Dufour effect on striations formation in radio-frequency discharges