Digitally Programmable Higher-order Harmonic Generation Using Nonlinear MEMS Resonator

Abstract

A fully electrically interfaced chip-scale Micro-Electro-Mechanical System based higher-order harmonic generator has multitudes of applications as it can simultaneously facilitate monolithic integration with on-chip electronics and offer microscopic footprint in comparison with the bulky and expensive high-order harmonic generation setup in optics. Here we report the first demonstration of a record-high harmonics generation over 100 tones using a thin-film Lead Zirconate Titanate flexural mode microresonator operating at CMOS compatible voltage levels. The harmonics can be befittingly controlled digitally post-fabrication as well.

References in corpus (5)

• Microresonator Soliton Dual-Comb Spectroscopy
• Optomechanical quantum information processing with photons and phonons
• Ab-initio multi-scale simulation of high-harmonic generation in solids
• Plasmon-assisted high-harmonic generation in graphene
• Nonlinear nano-electromechanical lattices for high-frequency, tunable stress propagation