High-frequency, resonant acousto-optic modulators fabricated in a MEMS foundry platform

Abstract

We report the design and characterization of high frequency, resonant acousto-optic modulators (AOM) in a MEMS foundry process. The doubly-resonant cavity design, with short ($L\sim 10.5\mu m$) acoustic and optical cavity lengths, allows us to measure acousto-optic modulation at GHz frequencies with high modulation efficiency. In contrast to traditional AOMs, these devices rely on the perturbation induced by the displacement of cavity boundaries, which can be significantly enhanced in a suspended geometry. This platform can serve as the building block for fast 2D spatial light modulators (SLM), low-cost integrated free space optical links and optically enhanced low-noise RF receivers.

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References in corpus (1)

• Attojoule Optoelectronics for Low-Energy Information Processing and Communications: a Tutorial Review

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