X-ray optics and beam characterization using random modulation: Theory

Abstract

X-ray near-field speckle-based phase-sensing approaches provide efficient means to characterise optical elements. Here, we present a theoretical review of several of these speckle methods in the frame of optical characterisation and provide a generalization of the concept. As we also demonstrate experimentally in another paper, the methods theoretically developed here can be applied with different beams and optics and within a variety of situations where at-wavelength metrology is desired. By understanding the differences between the various processing methods, it is possible to find and implement the best suited approach for each metrology scenario.

arXiv comment10 pages, 3 figures, 1 table