Development of novel one-shot full-field surface profilometer using chromatic confocal microscopy

Abstract

A novel full-field surface profilometer using diffractive-based chromatic confocal microscopy and area-scan spectral sensing is developed. A normalized cross correlation algorithm was developed to establish a spectrum-depth response curve. A measuring repeatability for a single surface depth can be controlled within 120 nanometers.

Conflict of interest between co-authors