Femtosecond laser crystallization of amorphous titanium oxide thin films
arXiv:1808.05061 · doi:10.1063/1.5027899
Abstract
In this paper we demonstrate experimentally that crystalline phases appear in amorphous titanium oxide upon processing with ultrafast laser pulses. Amorphous titanium thin films were produced by plasma-enhanced chemical vapor deposition (PECVD) and exposed to femtosecond laser pulses. Formation of rutile phase was confirmed by X-ray diffraction, Raman measurements and electron backscattering diffraction. A rang of processing parameters for the crystallization is reported and possible background mechanisms are discussed.
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Cited by in corpus (3)
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