Nanomechanical resonators for cryogenic research

Abstract

Suspended aluminium nanoelectromechanical resonators have been fabricated, and the manufacturing process is described in this work. Device motion is driven and detected with a magnetomotive method. The resonance response has been measured at 4.2 K temperature in vacuum and low pressure ${}^4$He gas. At low oscillation amplitudes the resonance response is linear, producing Lorentzian line shapes, and Q-values up to 4400 have been achieved. At higher oscillation amplitudes the devices show nonlinear Duffing-like behavior. The devices are found to be extremely sensitive to pressure in ${}^4$He gas. Such device is a promising tool for studying properties of superfluid helium.

arXiv comment8 pages, 6 figures, proceedings of QFS2018 conference, to be published in Journal of Low Temperature Physics (preprint)

References in corpus (12)

• Quartz Tuning Fork: Thermometer, Pressure- and Viscometer for Helium Liquids
• Momentum creation by vortices in 3He experiments as a model of primordial baryogenesis
• A Kelvin-wave cascade on a vortex in superfluid ${}^4$He at a very low temperature
• The Kelvin-wave cascade in the vortex filament model
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• Slippage and boundary layer probed in an almost-ideal gas by a nano-mechanical oscillator
• Kelvin waves and the decay of quantum superfluid turbulence
• Operating Nanobeams in a Quantum Fluid
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• Mutual friction in superfluid ${}^3$He-B in the low-temperature regime
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Cited by in corpus (5)

• Probing superfluid ${}^4\mathrm{He}$ with high-frequency nanomechanical resonators down to $\mathrm{mK}$ temperatures
• Detecting the "phonon wind" in superfluid ${}^4\mathrm{He}$ by a nanomechanical resonator
• Amplitude of waves in the Kelvin-wave cascade
• Dimensional control of tunneling two level systems in nanoelectromechanical resonators
• Superfluid ${}^4$He as a rigorous test bench for different damping models in nanoelectromechanical resonators