On the Role of Water Vapor and Process Gasses in Low-Temperature Gold-Catalyzed Graphene Etching

Abstract

The ability to pattern graphene at low temperatures in a scalable manner is one of the greatest challenges facing graphene industrial adoption today. We demonstrate a simple method for low-temperature gold-catalyzed etching of graphite with predictable characteristics using ambient air at $350-375^{\circ }$ C. The naturally occurring water vapor in ambient air is necessary for this reaction to occur. In addition, we characterize the etch characteristics as a function of process parameters. Ar annealing is required to obtain crystallographically straight etches, and $375^{\circ }$ C is required to obtain single-layer deep etching. We anticipate that this work can be adapted by future research to precisely control the shape of the etched areas, allowing for the simple low-temperature creation of nanoscale graphite features, and ultimately can be applied to single-layer graphene sheets for integrated device fabrication.