Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors

Abstract

We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5\% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. However, local deviations exhibit a Gaussian distribution in fractional frequency spacing with a standard deviation of $2.7\times 10^{-3}$. We exploit this finding to increase the yield of the BLAST-TNG $250\mu \text{m}$ production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.

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Cited by in corpus (8)

• A Microwave SQUID Multiplexer Optimized for Bolometric Applications
• SLAC Microresonator RF (SMuRF) Electronics: A tone-tracking readout system for superconducting microwave resonator arrays
• Wideband on-chip terahertz spectrometer based on a superconducting filterbank
• Transition Edge Sensors: Physics and Applications
• Development of MKIDs for measurement of the Cosmic Microwave Background with the South Pole Telescope
• Sub-Kelvin Thermometer for On-Chip Measurements of Microwave Devices Utilizing Two-Level Systems in Superconducting Microresonators
• Band engineering and study of disorder using topology in compact high kinetic inductance cavity arrays
• Flux ramp modulation based hybrid microwave SQUID multiplexer