On electron heating in a low pressure capacitively coupled oxygen discharge

Abstract

We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 to explore the charged particle densities, the electronegativity, the electron energy probability function (EEPF), and the electron heating mechanism in a single frequency capacitively coupled oxygen discharge when the applied voltage amplitude is varied. We explore discharges operated at 10 mTorr, where electron heating within the plasma bulk (the electronegative core) dominates, and at 50 mTorr where sheath heating dominates. At 10 mTorr the discharge is operated in combined drift-ambipolar (DA) and $\alpha$-mode and at 50 mTorr it is operated in pure $\alpha$-mode. At 10 mTorr the effective electron temperature is high and increases with increased driving voltage amplitude, while at 50 mTorr the effective electron temperature is much lower, in particular within the electronegative core, where it is roughly 0.2 - 0.3 eV, and varies only a little with the voltage amplitude.

References in corpus (3)

• The effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges
• Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas
• On the Role of Metastable States in Low Pressure Oxygen Discharges

Cited by in corpus (6)

• Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms
• Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas
• Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results
• The role of surface quenching of the singlet delta molecule in a capacitively coupled oxygen discharge
• Electron power absorption dynamics in a low pressure radio frequency driven capacitively coupled discharge in oxygen
• eduPIC: an introductory particle based code for radio-frequency plasma simulation