Micropillars with a controlled number of site-controlled quantum dots

Abstract

We report on the realization of micropillars with site-controlled quantum dots (SCQDs) in the active layer. The SCQDs are grown via the buried stressor approach which allows for the positioned growth and device integration of a controllable number of QDs with high optical quality. This concept is very powerful as the number and the position of SCQDs in the cavity can be simultaneously controlled by the design of the buried stressor. The fabricated micropillars exhibit a high degree of position control for the QDs above the buried stressor and $Q$-factors of up to 12000 at an emission wavelength around 930 nm. We experimentally analyze and numerically model the cavity $Q$-factor, the mode volume, the Purcell factor and the photon-extraction efficiency as a function of the aperture diameter of the buried stressor. Exploiting these SCQD micropillars, we experimentally observe the Purcell enhancement in the single-QD regime with $F_P$ = 4.3 $\pm$ 0.3.

5 pages, 4 figures

References in corpus (9)

• On-Demand Single Photons with High Extraction Efficiency and Near-Unity Indistinguishability from a Resonantly Driven Quantum Dot in a Micropillar
• Self-tuned quantum dot gain in photonic crystal lasers
• Controlled light-matter coupling for a single quantum dot embedded in a pillar microcavity using far-field optical lithography
• Highly indistinguishable on-demand resonance fluorescence photons from a deterministic quantum dot micropillar device with 75 $\%$ extraction efficiency
• Continuous-wave versus time-resolved measurements of Purcell-factors for quantum dots in semiconductor microcavities
• Resonance fluorescence of a site-controlled quantum dot realized by the buried-stressor growth technique
• Enhancing the photon-extraction efficiency of site-controlled quantum dots by deterministically fabricated microlenses
• Observation of the Purcell effect in high-index-contrast micropillar
• Fine tuning of micropillar cavity modes through repetitive oxidations

Cited by in corpus (3)

• Deterministic coupling of site-controlled quantum emitters in monolayer semiconductors to plasmonic nanocavities
• Enhanced photon-extraction efficiency from InGaAs/GaAs quantum dots in deterministic photonic structures at 1.3 μm fabricated by in-situ electron-beam lithography
• Enhanced Purcell factor for nanoantennas supporting interfering resonances