Numerical Modeling of MEMS Resonators
arXiv:1611.05310
Abstract
Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an analytical method.
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- Laser Optomechanics
- Nonlinear optical effects of ultrahigh-Q silicon photonic nanocavities immersed in superfluid helium
- Nonlinear dynamics of a functionally graded piezoelectric micro-resonator in the vicinity of the primary resonance