Numerical Modeling of MEMS Resonators

Abstract

Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an analytical method.

References in corpus (2)

• Nonlinear optical effects of ultrahigh-Q silicon photonic nanocavities immersed in superfluid helium
• Nonlinear dynamics of a functionally graded piezoelectric micro-resonator in the vicinity of the primary resonance

Cited by in corpus (2)

• Biosensing using Functionally Graded Piezoelectric MEMS Resonators
• Intermolecular Interactions in Radial-Contour Mode Microring Resonators