In-situ comprehensive calibration of a tri-port nano-electro-mechanical device

Abstract

We report on experiments performed in vacuum and at cryogenic temperatures on a tri-port nano-electro-mechanical (NEMS) device. One port is a very non-linear capacitive actuation, while the two others implement the magnetomotive scheme with a linear input force port and a (quasi-linear) output velocity port. We present an experimental method enabling a full characterization of the nanomechanical device harmonic response: the non-linear capacitance function $C(x)$ is derived, and the normal parameters $k$ and $m$ (spring constant and mass) of the mode under study are measured through a careful definition of the motion (in meters) and of the applied forces (in Newtons). These results are obtained with a series of purely electric measurements performed without disconnecting/reconnecting the device, and rely only on known DC properties of the circuit, making use of a thermometric property of the oscillator itself: we use the Young modulus of the coating metal as a thermometer, and the resistivity for Joule heating. The setup requires only three connecting lines without any particular matching, enabling the preservation of a high impedance NEMS environment even at MHz frequencies. The experimental data are fit to a detailed electrical and thermal model of the NEMS device, demonstrating a complete understanding of its dynamics. These methods are quite general and can be adapted (as a whole, or in parts) to a large variety of elecromechanical devices.

References in corpus (8)

• Cooling a nanomechanical resonator with quantum back-action
• Dynamical Backaction of Microwave Fields on a Nanomechanical Oscillator
• Classical to Quantum Transition of a Driven Nonlinear Nanomechanical Resonator
• Prospects for cooling nanomechanical motion by coupling to a superconducting microwave resonator
• Topology effects on the heat capacity of mesoscopic superconducting disks
• Silicon Vibrating Wires at Low Temperatures
• Thermal signatures of Little-Parks effect in the heat capacity of mesoscopic superconducting rings
• Nonlinear parametric amplification in a tri-port nanoelectromechanical device

Cited by in corpus (10)

• The thermal conductivity of silicon nitride membranes is not sensitive to stress
• Non-linear Frequency Transduction of Nano-mechanical Brownian Motion
• Measuring frequency fluctuations in nonlinear nanomechanical resonators
• Beyond linear coupling in microwave optomechanics
• Slippage and boundary layer probed in an almost-ideal gas by a nano-mechanical oscillator
• Evidence for the role of normal-state electrons in nanoelectromechanical damping mechanisms at very low temperatures
• Classical decoherence in a nanomechanical resonator
• Modal "self-coupling" as a sensitive probe for nanomechanical detection
• Surface-induced near-field scaling in the Knudsen layer of a rarefied gas
• Aluminum goalpost nano-mechanical devices at low temperatures