Capacitive displacement method to determine the longitudinal piezoelectric coefficients of single crystals, ceramics and thin films

Abstract

Recent developments in piezoelectric films have heightened the need for the reliable methods to correctly characterize their piezoelectric coefficients. Here, we demonstrate that capacitive displacement method can be used to determine longitudinal piezoelectric coefficients in both bulk and thin film of piezoelectric materials reliably and simply. Our technique allows accurate detection of elastic displacement at a level of 2 pm. This achievement is of great interest and significance for the development of piezoelectric integration technology in modern smartdevices.

11pages, 4 figures, new method to determine precisely piezoelectric constant of thin film