A new cantilever beam-rigid-body MEMS gyroscope: mathematical model and linear dynamics
arXiv:1408.3762
Abstract
A new microbeam-rigid-body gyroscope is introduced and its static and dynamic behaviours are studied. The main structure includes a microbeam and an eccentric end-rigid-body influencing the dynamic and static characteristics of the sensor. The sensitivity of the device and the effect of system parameters on the microsystem's response are investigated.
6 pages, 3 figures, Proceedings of the International Conference on Mechanical Engineering and Mechatronics Toronto, Ontario, Canada, August 8-10 2013, Paper No. 177