Photoluminescence of focused ion beam implanted Er:YSiO crystals
arXiv:1406.5371 · doi:10.1002/pssr.201409304
Abstract
Erbium doped low symmetry YSiO crystals attract a lot of attention in perspective of quantum information applications. However, only doping of the samples during growth is available up to now, which yields a quite homogeneous doping density. In the present work, we deposit Er-ions by the focused ion beam technique at Yttrium sites with several fluences in one sample. With a photoluminescence study of these locally doped Er:YSiO crystals, we are able to evaluate the efficiency of the implantation process and develop it for the highest efficiency possible. We observe the dependence of the ion activation after the post-implantation annealing on the fluence value.