Exploring the temporally resolved electron density evolution in EUV induced plasmas

Abstract

We measured for the first time the electron density in an Extreme Ultra-Violet induced plasma. This is achieved in a low-pressure argon plasma by using a method called microwave cavity resonance spectroscopy. The measured electron density just after the EUV pulse is $2.6\cdot 10^{16}$ m${}^{-3}$. This is in good agreement with a theoretical prediction from photo ionization, which yields a density of $4.5\cdot 10^{16}$ m${}^{-3}$. After the EUV pulse the density slightly increase due to electron impact ionization. The plasma (i.e. electron density) decays in tens of microseconds.

3 pages, 4 figures

Cited by in corpus (3)

• Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen
• Discharge-produced plasma extreme ultraviolet (EUV) source and ultra high vacuum chamber for studying EUV-induced processes
• Exploring the electron density in plasmas induced by extreme ultraviolet radiation in argon