Scanning capacitance microscopy using a relaxation oscillator

Abstract

We have performed scanning capacitance microscopy using a relaxation oscillator. Precision calibrations indicate a sensitivity on the order of 0.05 pF. Surface topography of metallic structures, such as machined grooves and coins, can be readily obtained either in the constant-height (non-contact) or tapping (contact) mode. Spatial resolution of sub-50 $\mu$m has been achieved.

References in corpus (2)

• An integrated capacitance bridge for high-resolution, wide temperature range quantum capacitance measurements
• Potential contributions of noncontact atomic force microscopy for the future Casimir force measurements