A novel scheme for simple and precise measurement of the complex refractive index and thickness of thin films
arXiv:1312.0312 · doi:10.1117/12.2067095
Abstract
We demonstrate applications of a novel scheme which is used for measuring refractive index and thickness of thin film by analyzing the relative phase difference and reflected ratio at reflection point of a monolithic folded Fabry-Perot cavity (MFC). The complex refractive index and the thickness are calculated according to the Fresnel formula. Results show that the proposed method has a big improvement in accuracy with simple and clear operating process compared with the conventional Ellipsometry.
arXiv admin note: substantial text overlap with arXiv:1307.0931