Micromanipulation transfer of membrane resonators for circuit optomechanics
arXiv:1307.1619 · doi:10.1088/0960-1317/23/12/125024
Abstract
A capacitive coupling between mechanical resonator and a microwave cavity enables readout and manipulation of the vibrations. We present a setup to carry out such experiments with aluminum membranes fabricated as stamps and transferred in place with micromanipulation. The membrane is held in place by van der Waals forces, and is supported by three microscopic points. We measure the lowest mechanical modes, and conclude the membrane vibrates as an essentially free-free resonator. Sliding clamping conditions are identified via a softening Duffing nonlinearity. The method will enable reduction of clamping losses, while maintaining a narrow vacuum gap for strong capacitive coupling.
4 pages
References in corpus (10)
- Circuit cavity electromechanics in the strong coupling regime
- Microwave amplification with nanomechanical resonators
- Minimization of phonon-tunneling dissipation in mechanical resonators
- Stamp transferred suspended graphene mechanical resonators for radio-frequency electrical readout
- Intrinsic dissipation in nanomechanical resonators due to phonon tunneling
- Nonlinearity in nanomechanical cantilevers
- Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams
- Microwave cavity-enhanced transduction for plug and play nanomechanics at room temperature
- Addressing geometric non-linearities with cantilever MEMS: beyond the Duffing model
- Tension-induced non-linearities of flexural modes in nanomechanical resonators