Niobium-based superconducting nano-devices fabrication using all-metal suspended masks
arXiv:1304.5381 · doi:10.1088/0957-4484/24/37/375304
Abstract
We report a novel method for the fabrication of superconducting nanodevices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium-gold-niobium proximity SQUIDs.
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