Experimental demonstration of broadband absorption enhancement in partially aperiodic silicon nanohole structures
arXiv:1303.4781 · doi:10.1364/OE.21.00A872
Abstract
We report the design, fabrication, and optical absorption measurement of silicon membranes patterned with partially aperiodic nanohole structures. We demonstrate excellent agreement between measurement and simulations. We optimize a partially aperiodic structure using a random walk algorithm and demonstrate an experimental broadband absorption of 4.9 times that of a periodic array.
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