A real-time beam current density meter
arXiv:1302.4812 · doi:10.1063/1.4795400
Abstract
We have developed a real-time beam current density meter for charged particle beams. It measures the mean current density by collimating a uniform and large diameter primary beam. The suppression of the secondary electrons and the deflection of the beam were simulated, and it was tested with a 105 keV Ar7+ ion beam.
3 pages, 5 figures, submitted to Review of Scientific Instruments