High quality factor single-crystal diamond mechanical resonators

Abstract

Single-crystal diamond is a promising material for MEMs devices because of its low mechanical loss, compatibility with extreme environments, and built-in interface to high-quality spin centers. But its use has largely been limited by challenges in processing and growth. We demonstrate a wafer bonding-based technique to form diamond on insulator, from which we make single-crystal diamond micromechanical resonators with mechanical quality factors as high as 338,000 at room temperature. Variable temperature measurements down to 10 K reveal a nonmonotonic dependence of quality factor on temperature. These resonators enable integration of single-crystal diamond into MEMs technology for classical and quantum applications.

15 pages total, 4 figures, 1 table

References in corpus (2)

• Strong dispersive coupling of a high finesse cavity to a micromechanical membrane
• Minimization of phonon-tunneling dissipation in mechanical resonators

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