Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt

Abstract

Cobalt-containing deposits from Cobalt carbonyl are experimentally produced and their composition is measured. The Cobalt concentration is found to be readily tunable between 20 and 70 at.% by variation of the dwell time. The variations in metallic concentration are explained by co-deposition of hydrocarbons present in the chamber background pressure.

6 pages, 7 figures

References in corpus (3)

• One nanometer thin carbon nanosheets with tunable conductivity and stiffness
• Resolution in Focused Electron- and Ion-Beam Induced Chemical Vapor Deposition
• Dose and energy dependence of mechanical properties of focused electron beam induced pillar deposits from Cu(C5HF6O2)2

Cited by in corpus (1)

• Spontaneous Dissociation of Co2(CO)8 and Autocatalytic growth of Co on SiO2 : A Combined Experimental and Theoretical Investigation