Influence of random roughness on cantilever curvature sensitivity
arXiv:1001.1645 · doi:10.1063/1.3299713
Abstract
In this work we explore the influence of random surface roughness on the cantilever sensitivity to respond to curvature changes induced by changes in surface stress. The roughness is characterized by the out-of-plane roughness amplitude w, the lateral correlation length x, and the roughness or Hurst exponent H (0<H<1). The cantilever sensitivity is found to decrease with increasing roughness (decreasing H and/or increasing ratio w/x) or equivalently increasing local surface slope. Finally, analytic expressions of the cantilever sensitivity as a function of the parameters w, x, and H are derived in order to allow direct implementation in sensing systems.
10 pages, 3 figures
References in corpus (5)
- A tunable carbon nanotube electromechanical oscillator
- Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
- The effect of surface roughness on the adhesion of elastic solids
- Dissipation in Nanocrystalline-Diamond Nanomechanical Resonators
- Measuring the surface stress polar dependence