Integrated 3D Sound Intensity Sensor with Four-Wire Particle Velocity Sensors
arXiv:0805.0906
Abstract
A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded "back chamber" at both sides of the chip.
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)