Radio-frequency discharges in Oxygen. Part 1: Modeling

Abstract

In this series of three papers we present results from a combined experimental and theoretical effort to quantitatively describe capacitively coupled radio-frequency discharges in oxygen. The particle-in-cell Monte-Carlo model on which the theoretical description is based will be described in the present paper. It treats space charge fields and transport processes on an equal footing with the most important plasma-chemical reactions. For given external voltage and pressure, the model determines the electric potential within the discharge and the distribution functions for electrons, negatively charged atomic oxygen, and positively charged molecular oxygen. Previously used scattering and reaction cross section data are critically assessed and in some cases modified. To validate our model, we compare the densities in the bulk of the discharge with experimental data and find good agreement, indicating that essential aspects of an oxygen discharge are captured.

11 pages, 10 figures

References in corpus (1)

• Photon and Z induced heavy charged lepton pair production at a hadron supercollider

Cited by in corpus (7)

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• Implicit and electrostatic Particle-in-cell/Monte Carlo model in two dimensional and axisymmetric geometry II: Self-bias voltage effects in capacitively coupled plasmas
• Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas
• Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results
• Zero-dimensional and pseudo-one-dimensional models of atmospheric-pressure plasma jet in binary and ternary mixtures of oxygen and nitrogen with helium background
• On the Role of Metastable States in Low Pressure Oxygen Discharges
• eduPIC: an introductory particle based code for radio-frequency plasma simulation