most citedDielectronic Recombination of Fe XV forming Fe XIV: Laboratory Measurements and Theoretical Calculations

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cs.OH2007★ 6 cited

Electromechanical Reliability Testing of Three-Axial Silicon Force Sensors

S. Spinner, J. Bartholomeyczik, B. Becker +6

This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The siliconbased sensor…