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cs.OH2007

The annealing induced extraordinary properties of SI based ZNO film grown by RF sputtering

Jing Li, L. Dedeng, Suntao Wu

Pb(Zr0.52Ti0.48)O3 (PZT) thin films were in situ deposited by pulsed laser deposition (PLD) on Pt/Ti/SiO2/Si substrates using a template layer derived by sol-gel method. A 0.1-m…