Phase composition and transformations in magnetron-sputtered (Al,V)2O3 coatings

L. Landälv, C-F. Carlström, J. Lu +7

Coatings of (Al1-xVx)2O3, with x ranging from 0 to 1, were deposited by pulsed DC reactive sputter deposition on Si(100) at a temperature of 550 °C. XRD showed three different crys…