45 citations
2 papers
cond-mat.mtrl-sci2019★ 45 cited
Microstructures Diagram Of Magnetron Sputtered Aln Deposits : Amorphous And Nanostructured Films
Valerie Brien, P. Pigeat
In order to get homogeneous nanostructured Aluminum Nitride deposits, thin films were grown at room temperature on [001] Si substrates by radio frequency magnetron reactive sputter…
math.AG2019★ 9 cited
The algebraic dimension of compact complex threefolds with vanishing second Betti numbers
Frederic Campana, Jean-Pierre Demailly, Thomas Peternell
Small changes in sections 4 and 5, results not affected